Mid-Infrared Micro-Displacement Measurement with a Bidimensional Silicon Photonic Crystal
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Date
2020
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Publisher
Université de M'sila
Abstract
In this work, a micro displacement sensor based on dual micro-cavities coupled to a photonic
crystal waveguide is proposed. The defects are introduced to create a sharp resonance in the structure
which makes it useful for detecting micro displacement changes. The sensing principle is based on the
change of the output signal transmission with the change of the displacement of a moving part compared
to a fixed part of sensor structure. The proposed structure reached a good sensitivity of 9.52a−1